منابع مشابه
A batch fabricated capacitive pressure sensor with an integrated Guyton capsule for interstitial fluid pressure measurement
In this paper, we present the design, fabrication and test of a batch fabricated capacitive pressure sensor with an integrated Guyton capsule for interstitial fluid pressure measurement. The sensor is composed of 12 μm thick single crystalline silicon membrane and a 3 μm gap, hermetically sealed through silicon–glass anodic bonding. A novel batch scale method for creating electrical feed-throug...
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Background. As interest on wearable computing [1] increases, researchers are looking for new materials to use as a support for electronics. A fabric substrate is very appealing: it is elastic and extensible [2], supported by a well known technology and produced at low-cost. State of the art. Some smart pressure-sensors interfacing with a flexible substrate have been developed, but they are eith...
متن کامل5.4: A Textile Based Capacitive Pressure Sensor
INTRODUCTION The sense of touch plays an important role in everyday life. It provides the body with early contact to surrounding objects. By touching an object, we can tell if it is sharp or smooth; by holding it, we can estimate its weight. Skin is the most extended sensor of the entire human body. The haptic interface gives the first feedback to object manipulation; without sensing the pressu...
متن کاملCapacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip
The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consi...
متن کاملAnalytical Analysis of Capacitive Pressure Sensor with Clamped Diaphragm (RESEARCH NOTE)
Abstract In this paper analytical analysis of capacitive pressure sensor with clamped diaphragm is presented. Mechanical and electrical properties of the sensor are theoretically analyzed based on theory of thin plates with small deflection and the results are evaluated by use of finite element analysis. The central deflection and capacitance values under uniform external pressure are calcula...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Electronics, Information and Systems
سال: 1989
ISSN: 0385-4221,1348-8155
DOI: 10.1541/ieejeiss1987.109.12_820